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Miniaturization of low-pressure-discharges

In the booming research field of the miniaturization of analytical instruments and methods ("lab-on-the-chip") there is an increasing interest in plasma sources which can be operated on micro-chips. The dielectric barrier discharge (DBD) is a new type of plasma for microchip application in analytical chemistry. Dielectric barrier discharges are used, for example, in flat panel plasma displays for color TV screens or are applied to industrial production of ozone. We use a barrier discharge which was integrated in a glass-chip with reduced pressures of 1-160 mbar. The configuration is appropriate for Diode Laser Atomic Absorption Spectrometry.

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2. November 2001
Kerstin Kunze